Ultrahigh-Q photonic crystal cavities in silicon rich nitride.
نویسندگان
چکیده
Ultrahigh-Q Photonic Crystal cavities were realized in a suspended Silicon Rich Nitride (SiNx) platform for applications at telecom wavelengths. Using a line width modulated cavity design we achieved a simulated Q of 520,000 with a modal volume of 0.77(λ/n)3. The fabricated cavities were measured using the resonance scattering technique and we demonstrated a measured Q of 120,000. The experimental spectra at different input power also indicate that the non-linear losses are negligible in this material platform.
منابع مشابه
Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities.
We present the fabrication and characterization of high-quality-factor (Q) Si3N4 photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our grating spectrometer. This is a 1-ord...
متن کاملNear-infrared characterization of gallium nitride photonic-crystal waveguides and cavities.
We report the design and optical characterization of fully suspended wire waveguides and photonic crystal (PhC) membranes fabricated on a gallium nitride layer grown on silicon substrate operating at 1.5 μm. W1-type PhC waveguides are coupled with suspended wires and are investigated using a standard end-fire setup. The experimental and theoretical dispersion properties of the propagating modes...
متن کاملSilicon-based Photonic, Plasmonic, and Optomechanic Devices a Dissertation Submitted to the Department of Electrical Engineering and the Committee on Graduate Studies of Stanford University in Partial Fulfillment of the Requirements for the Degree of Doctor of Philosophy
The integration of optical devices and electronic devices on the same platform is currently a gateway into many research and practical applications. Because silicon and silicon compatible materials have dominated electronic development, optical devices must also conform to the silicon platform. One of the greatest challenges in building such an integrated opto-electronic system is the developme...
متن کاملDeterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities.
Photonic crystal nanobeam cavities are versatile platforms of interest for optical communications, optomechanics, optofluidics, cavity QED, etc. In a previous work [Appl. Phys. Lett. 96, 203102 (2010)], we proposed a deterministic method to achieve ultrahigh Q cavities. This follow-up work provides systematic analysis and verifications of the deterministic design recipe and further extends the ...
متن کاملObservation of transparency of Erbium-doped silicon nitride in photonic crystal nanobeam cavities.
One dimensional nanobeam photonic crystal cavities are fabricated in an Er-doped amorphous silicon nitride layer. Photoluminescence from the cavities around 1.54 microm is studied at cryogenic and room temperatures at different optical pump powers. The resonators demonstrate Purcell enhanced absorption and emission rates, also confirmed by time resolved measurements. Resonances exhibit linewidt...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Optics express
دوره 25 22 شماره
صفحات -
تاریخ انتشار 2017